Vol. 14, No. 3, December 2001, 337-356

NON-EQUILIBRIUM PLASMAS IN TELECOMMUNICATION RELATED TECHNOLOGIES

Zoran Lj. Petrović, Zoran M. Raspopović, and Toshiaki Makabe

Abstract: In this paper we give a review of some of the recent advances in modeling of ionized gases and their implications in telecommunications. In particular we discuss the gas breakdown due to rf and microwave fields, the multipacting discharges and the rf discharges used for integrated circuit processing.

Key words: Plasma, gas discharges, plasma processing, multipacting discharges, atmosphere, electron swarms, transport coefficients, gas breakdown, integrated circuit technologies.

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